JPH0512678B2 - - Google Patents
Info
- Publication number
- JPH0512678B2 JPH0512678B2 JP63070625A JP7062588A JPH0512678B2 JP H0512678 B2 JPH0512678 B2 JP H0512678B2 JP 63070625 A JP63070625 A JP 63070625A JP 7062588 A JP7062588 A JP 7062588A JP H0512678 B2 JPH0512678 B2 JP H0512678B2
- Authority
- JP
- Japan
- Prior art keywords
- guide
- support
- movement
- guide surface
- driving means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
- B23Q1/4852—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair
- B23Q1/4866—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single sliding pair followed perpendicularly by a single rotating pair followed perpendicularly by a single sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63070625A JPH01242989A (ja) | 1988-03-24 | 1988-03-24 | テーブルの縦横移動旋回機構 |
DE3909292A DE3909292C2 (de) | 1988-03-24 | 1989-03-21 | Längs- und Quer-Tischführungs- und -drehmechanismus |
US07/334,208 US5031547A (en) | 1988-03-24 | 1989-03-24 | Mechanism for moving a table lengthwise and crosswise and for turning the table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63070625A JPH01242989A (ja) | 1988-03-24 | 1988-03-24 | テーブルの縦横移動旋回機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01242989A JPH01242989A (ja) | 1989-09-27 |
JPH0512678B2 true JPH0512678B2 (en]) | 1993-02-18 |
Family
ID=13436988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63070625A Granted JPH01242989A (ja) | 1988-03-24 | 1988-03-24 | テーブルの縦横移動旋回機構 |
Country Status (3)
Country | Link |
---|---|
US (1) | US5031547A (en]) |
JP (1) | JPH01242989A (en]) |
DE (1) | DE3909292C2 (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09155666A (ja) * | 1995-12-01 | 1997-06-17 | Kazuya Hirose | ステージの縦横移動旋回支持機構 |
Families Citing this family (63)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2523177B2 (ja) * | 1989-04-28 | 1996-08-07 | 日本写真印刷株式会社 | 位置決めテ―ブル |
JPH03159148A (ja) * | 1989-11-16 | 1991-07-09 | Advantest Corp | 位置決め装置及びこの位置決め装置を利用したic試験装置 |
JPH03224006A (ja) * | 1990-01-30 | 1991-10-03 | Matsushita Electric Ind Co Ltd | 数値制御装置 |
JP2557316Y2 (ja) * | 1990-02-28 | 1997-12-10 | エヌティエヌ 株式会社 | 移動テーブル |
US5163651A (en) * | 1990-03-13 | 1992-11-17 | Ntn Corporation | Movable table |
JP3158485B2 (ja) * | 1991-04-23 | 2001-04-23 | ソニー株式会社 | 陰極線管位置決め装置 |
DE4325450A1 (de) * | 1993-07-29 | 1995-02-02 | Bacher Graphische Geraete Gmbh | Tischverstellvorrichtung |
US5660381A (en) * | 1994-02-07 | 1997-08-26 | Ushiodenki Kabushiki Kaisha | Carrier device |
US6246204B1 (en) * | 1994-06-27 | 2001-06-12 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
US5548195A (en) * | 1994-12-22 | 1996-08-20 | International Business Machines Corporation | Compensated servo control stage positioning apparatus |
JPH08190430A (ja) * | 1995-01-12 | 1996-07-23 | Matsushita Electric Ind Co Ltd | 位置決めテーブル |
JP2759912B2 (ja) * | 1996-02-07 | 1998-05-28 | 和也 廣瀬 | 多自由度テーブル機構用支持ユニット並びに多自由度テーブル機構 |
DE19882275B4 (de) * | 1997-03-28 | 2011-08-11 | Preco Industries, Inc., Kan. | Bahn- oder tafelgespeiste Vorrichtung mit Hochgeschwindigkeits-Positioniereinrichtung |
JPH11154698A (ja) * | 1997-11-21 | 1999-06-08 | Nikon Corp | テーブル支持装置 |
JPH11300557A (ja) | 1998-04-15 | 1999-11-02 | Thk Co Ltd | 移動テーブル装置 |
DE19938791B4 (de) * | 1999-08-16 | 2004-07-29 | Erich Neumayer Gmbh & Co Kg | Verfahren zur Herstellung einer gebauten Welle und Vorrichtung zur Durchführung dieses Verfahrens |
JP2001328043A (ja) * | 2000-05-24 | 2001-11-27 | Harmonic Drive Syst Ind Co Ltd | テーブル位置決め装置 |
US6463664B1 (en) * | 2000-10-19 | 2002-10-15 | Sandia Corporation | Multi-axis planar slide system |
DE10112978C2 (de) * | 2001-03-17 | 2003-06-12 | Karlsruhe Forschzent | Transportable Feinjustiervorrichtung |
JP4560235B2 (ja) * | 2001-05-16 | 2010-10-13 | 日本トムソン株式会社 | 角度調整テーブル装置 |
US6824343B2 (en) * | 2002-02-22 | 2004-11-30 | Applied Materials, Inc. | Substrate support |
US6892652B2 (en) * | 2002-08-19 | 2005-05-17 | Branson Ultrasonics Corporation | Self-adjusting dynamic floating fixture |
JP4628012B2 (ja) * | 2004-04-15 | 2011-02-09 | 津田駒工業株式会社 | 傾斜テーブル装置 |
US7240580B2 (en) * | 2004-11-02 | 2007-07-10 | Everman Michael R | Single degree of freedom axis positioner |
CN101705969B (zh) * | 2005-08-31 | 2012-01-11 | Thk株式会社 | 引导台装置 |
DE102005053754A1 (de) | 2005-11-10 | 2007-05-16 | Maquet Gmbh & Co Kg | Einrichtung zum Verstellen der Liegefläche eines Operationstisches |
DE102005053753A1 (de) * | 2005-11-10 | 2007-05-16 | Maquet Gmbh & Co Kg | Hydraulische Säulenklemmung |
DE102005054175A1 (de) * | 2005-11-14 | 2007-05-16 | Maquet Gmbh & Co Kg | Gelenkanordnung zur Verbindung zweier Segmente einer Patientenlagerfläche |
DE102005054230A1 (de) | 2005-11-14 | 2007-05-24 | Maquet Gmbh & Co. Kg | Verfahren und Einrichtung zur bidirektionalen IR-Datenübertragung zwischen einem Operationstisch und einem Bediengerät |
DE102005054223A1 (de) * | 2005-11-14 | 2007-05-16 | Maquet Gmbh & Co Kg | Einrichtung zum Verstellen eines Operationstisches |
DE102005054220B4 (de) * | 2005-11-14 | 2024-12-05 | MAQUET GmbH | Patientenlagersystem |
DE102005054174A1 (de) * | 2005-11-14 | 2007-05-16 | Maquet Gmbh & Co Kg | Patientenlagerfläche für einen Operationstisch |
DE102005054221A1 (de) * | 2005-11-14 | 2007-05-16 | Maquet Gmbh & Co Kg | Patientenlagersystem |
DE102005054222A1 (de) | 2005-11-14 | 2007-05-16 | Maquet Gmbh & Co Kg | Operationstisch |
CA2629355A1 (en) * | 2005-11-17 | 2007-06-07 | Socovar, Societe En Commandite | Planar parallel mechanism and method |
US8141452B2 (en) * | 2006-10-26 | 2012-03-27 | Barry Lynn Wood | Rotational motion-positioning apparatus |
JP2007054953A (ja) * | 2006-11-21 | 2007-03-08 | Nsk Ltd | 位置決め装置 |
JP4767824B2 (ja) * | 2006-11-30 | 2011-09-07 | ヒーハイスト精工株式会社 | 多自由度球面軸受 |
EP2095412B1 (en) * | 2006-12-14 | 2016-06-29 | Kemet Japan CO., LTD. | Disc holding apparatus and defect/foreign material detecting apparatus |
US8151660B2 (en) * | 2007-02-23 | 2012-04-10 | RPY Motion, Inc. | Three axes rotational motion-positioning apparatus |
TWI347469B (en) * | 2007-04-27 | 2011-08-21 | Hon Hai Prec Ind Co Ltd | Fixation device and method for controlling thereof |
US20090057520A1 (en) * | 2007-09-05 | 2009-03-05 | Makoto Tada | Displacement Platform with a Precision Plane |
US7607234B2 (en) * | 2007-09-05 | 2009-10-27 | Hiwin Mikrosystem Corp. | Positive load alignment mechanism |
DE102007047184A1 (de) * | 2007-10-02 | 2009-04-09 | Carl Zeiss Microimaging Gmbh | Kreuzdrehtisch, insbesondere für Mikroskope |
JP5208552B2 (ja) * | 2008-03-27 | 2013-06-12 | Necエンベデッドプロダクツ株式会社 | 位置決め冶具 |
US8556246B2 (en) * | 2008-06-27 | 2013-10-15 | Qem, Inc. | Low-profile X-Y table |
TW201013835A (en) * | 2008-09-26 | 2010-04-01 | Gudeng Prec Industral Co Ltd | Sheet clamping apparatus |
JP4949431B2 (ja) * | 2009-04-28 | 2012-06-06 | 東芝テリー株式会社 | XYθステージ機構および引っ張りばねの脱着装置 |
DE102011016288A1 (de) * | 2011-04-07 | 2012-10-11 | Gildemeister Drehmaschinen Gmbh | Drehmaschine |
US9082799B2 (en) * | 2012-09-20 | 2015-07-14 | Varian Semiconductor Equipment Associates, Inc. | System and method for 2D workpiece alignment |
CN103777383B (zh) * | 2013-12-31 | 2016-06-08 | 深圳市华星光电技术有限公司 | 液晶基板配向检查系统 |
JP5819998B2 (ja) * | 2014-01-29 | 2015-11-24 | ファナック株式会社 | 二つの基準面にワークを位置決めするワーク位置決め装置 |
JP2015229211A (ja) * | 2014-06-04 | 2015-12-21 | 日本精工株式会社 | ワークの自動芯出し装置及び自動芯出し方法 |
US9715838B2 (en) * | 2014-07-22 | 2017-07-25 | Humanetics Innovative Solutions, Inc. | Positioning table assembly for crash test dummy |
DE102015208738B4 (de) * | 2015-05-12 | 2018-11-08 | Volkswagen Aktiengesellschaft | Head-up-Display für ein Fahrzeug |
FR3046451B1 (fr) * | 2016-01-06 | 2018-07-06 | Micro-Controle - Spectra-Physics | Systeme de generation de deplacement d'une plaque de support selon six degres de liberte. |
EP3507083B1 (de) * | 2016-08-30 | 2021-12-15 | HELLA GmbH & Co. KGaA | Vorrichtung und verfahren zum fügen einer lichtscheibe mit einem gehäuse einer beleuchtungseinrichtung |
CN107481767B (zh) * | 2017-09-11 | 2023-01-24 | 河南理工大学 | 驱动组件及柔性精密定位平台 |
US10612590B2 (en) | 2018-01-24 | 2020-04-07 | New-Field Energy, LLC | Buoyancy-enhanced helical loop drive system |
KR102217780B1 (ko) * | 2018-06-12 | 2021-02-19 | 피에스케이홀딩스 (주) | 정렬 장치 |
CN113210745B (zh) * | 2021-05-19 | 2021-12-21 | 无锡市星达石化配件有限公司 | 一种法兰端面加工方法 |
CN115071644B (zh) * | 2022-06-21 | 2024-10-01 | 中国科学院长春光学精密机械与物理研究所 | 一种车载光电测量设备对中机构 |
CN114905470B (zh) * | 2022-07-19 | 2022-11-08 | 深圳市易天自动化设备股份有限公司 | 移动对位平台 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3010363A (en) * | 1958-09-25 | 1961-11-28 | Leitz Ernst Gmbh | Parallelogram guide for object tables and the like |
US3270591A (en) * | 1963-07-09 | 1966-09-06 | Winter Products Inc | Spacing table |
US3270423A (en) * | 1963-09-30 | 1966-09-06 | Sheffield Corp | Positioning device |
US3744902A (en) * | 1968-10-23 | 1973-07-10 | Siemens Ag | Device for producing a photo-varnish mask |
US3849857A (en) * | 1973-07-05 | 1974-11-26 | M Murray | Machine element alignment positioner |
JPS5650517Y2 (en]) * | 1977-02-09 | 1981-11-26 | ||
US4118869A (en) * | 1977-03-02 | 1978-10-10 | Jenoptik Jena G.M.B.H. | Device for positioning an object |
US4408830A (en) * | 1981-03-02 | 1983-10-11 | The United States Of America As Represented By The Secretary Of The Navy | Multidirectional translator mechanism |
US4602555A (en) * | 1984-02-01 | 1986-07-29 | Mts Systems Corporation | Preloaded table coupling |
JPS62156897U (en]) * | 1986-03-19 | 1987-10-05 | ||
JPS62282294A (ja) * | 1986-05-30 | 1987-12-08 | 松下電器産業株式会社 | 位置決めテ−プル |
US4784377A (en) * | 1986-12-23 | 1988-11-15 | Northern Telecom Limited | Apparatus for locating and supporting ceramic substrates |
-
1988
- 1988-03-24 JP JP63070625A patent/JPH01242989A/ja active Granted
-
1989
- 1989-03-21 DE DE3909292A patent/DE3909292C2/de not_active Expired - Fee Related
- 1989-03-24 US US07/334,208 patent/US5031547A/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09155666A (ja) * | 1995-12-01 | 1997-06-17 | Kazuya Hirose | ステージの縦横移動旋回支持機構 |
Also Published As
Publication number | Publication date |
---|---|
DE3909292C2 (de) | 2000-06-21 |
US5031547A (en) | 1991-07-16 |
JPH01242989A (ja) | 1989-09-27 |
DE3909292A1 (de) | 1989-10-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0512678B2 (en]) | ||
JP4560235B2 (ja) | 角度調整テーブル装置 | |
JP2759912B2 (ja) | 多自由度テーブル機構用支持ユニット並びに多自由度テーブル機構 | |
US4838515A (en) | Article positioner and method | |
JP2700050B2 (ja) | 縦横移動旋回テーブル機構 | |
US5156318A (en) | Ultrasonic bonding apparatus for bonding a semiconductor device to a tab tape | |
EP0666132B1 (en) | Means for positioning an element, whereby a rotatable element is mounted excentrically on a rotable base plate | |
US6651969B2 (en) | Table positioning device | |
JP2000218451A (ja) | 混合機構式多軸工作機械 | |
KR20030006756A (ko) | 일렬로 배치되어 직선운동하는 두 이동부재를 이용한작업대 이동장치 | |
JP2727368B2 (ja) | Xyテーブル | |
JP3733808B2 (ja) | XYθ3軸移動テーブル | |
JPH078464B2 (ja) | テーブルの位置決め機構 | |
JPS6012171B2 (ja) | X−y方向作動テ−ブルの動作装置 | |
JP2881005B2 (ja) | 工作機械用軌道テーブル | |
JP3222230B2 (ja) | 微小移動XYθテーブル | |
JPH0224033A (ja) | Xyテーブル | |
JP2003048032A (ja) | 加工装置 | |
JPH10128646A (ja) | 薄板円板状ワークの両面研削装置 | |
JPH0811336B2 (ja) | Xyテーブル | |
JP3373229B2 (ja) | ワークストッカのワーク位置決め装置 | |
JPS6119521A (ja) | 治具角度変更装置 | |
JPH04159041A (ja) | テーブルの位置決め機構 | |
JPH0224032A (ja) | Xyテーブル | |
JP2973344B2 (ja) | 搬送位置決めロボット |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |